Si 2s
| name | Intensity | unit |
| orbit | Si 2s | |
| source | Ga Ka | |
| source energy | 9251.74 | eV |
| pass energy | 200 | eV |
| start energy (kinetic) | 9087 | eV |
| end energy (kinetic) | 9103 | eV |
| start energy (binding) | 161.04 | eV |
| end energy (binding) | 145.04 | eV |
| energy step | 0.1 | eV |
| dwell / point | 1 | sec |
| number of sweep | 10 | |
| mode | sweep | |
| total measurement time | 56.3 | min |
| entrance slit | 0.5 | mm |
| lens mode | transmission | |
| data points | 161 | |
| take off angle | 88 | deg |
| neutralize | ||
| comment |