Si 1s
name | Si wafer | unit |
orbit | Si 1s | |
source | Ga Ka | |
source energy | 9251.74 | eV |
pass energy | 200 | eV |
start energy (kinetic) | 7398 | eV |
end energy (kinetic) | 7414 | eV |
start energy (binding) | 1850.04 | eV |
end energy (binding) | 1834.04 | eV |
energy step | 0.1 | eV |
dwell / point | 1 | sec |
number of sweep | 1 | |
mode | sweep | |
total measurement time | 5.6 | min |
entrance slit | 0.5 | mm |
lens mode | transmission | |
data points | 161 | |
take off angle | 88 | deg |
neutralize | ||
comment |