測定結果

Si 1s

name Si wafer unit
orbit Si 1s
source Ga Ka
source energy 9251.74 eV
pass energy 200 eV
start energy (kinetic) 7398 eV
end energy (kinetic) 7414 eV
start energy (binding) 1850.04 eV
end energy (binding) 1834.04 eV
energy step 0.1 eV
dwell / point 1 sec
number of sweep 1
mode sweep
total measurement time 5.6 min
entrance slit 0.5 mm
lens mode transmission
data points 161
take off angle 88 deg
neutralize
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