測定結果

Ge 2p3/2

name Ge unit
sample shape wafer
orbit Ge 2p3/2
source Ga Ka
source energy 9251.74 eV
pass energy 200 eV
start energy (kinetic) 8018 eV
end energy (kinetic) 8038 eV
start energy (binding) 1230.04 eV
end energy (binding) 1210.04 eV
energy step 0.2 eV
dwell / point 1 sec
number of sweep 3
mode sweep
total measurement time 9.5 min
entrance slit 0.5 mm
lens mode transmission
data points 101
take off angle 88 deg
neutralize
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