Survey
| name | Fe Sheet | Fe Sheet | unit |
| sample shape | Sheet | Sheet | |
| orbit | Survey | Survey | |
| source | Ga Ka | Al Ka | |
| source energy | 9251.74 | 1486 | eV |
| pass energy | 500 | 200 | |
| start energy (kinetic) | 8251.74 | 300 | eV |
| end energy (kinetic) | 9261.74 | 1491 | eV |
| start energy (binding) | -13.7 | -8.7 | eV |
| end energy (binding) | 996.3 | 1182.3 | eV |
| energy step | 1 | 1 | eV |
| dwell / point | 0.3 | 0.3 | sec |
| number of sweep | 1 | 1 | sweep |
| mode | Swept | Swept | |
| total measurement time | 5.275 | 6.05 | min |
| entrance slit | 0.5 | 0.5 | mm |
| lens mode | Transmission | Transmission | |
| data points | 1011 | 1192 | |
| take off angle | 88 | 88 | |
| neutralize | |||
| comment |