O 1s
| name | Cu | Cu | unit |
| sample shape | sheet | sheet | |
| orbit | O 1s | O 1s Cu LMM | |
| source | Ga Ka | Al Ka | |
| source energy | 9251.74 | 1486 | eV |
| pass energy | 200 | 200 | |
| start energy (kinetic) | 8709.74 | 856 | eV |
| end energy (kinetic) | 8729.74 | 964 | eV |
| start energy (binding) | 522 | 522 | eV |
| end energy (binding) | 542 | 630 | eV |
| energy step | 0.2 | 0.2 | eV |
| dwell / point | 0.5 | 0.5 | sec |
| number of sweep | 10 | 4 | sweep |
| mode | Swept | Swept | |
| total measurement time | 15.75 | 20.9667 | min |
| entrance slit | 0.5 | 0.5 | mm |
| lens mode | Transmission | Transmission | |
| data points | 101 | 541 | |
| take off angle | 88 | 88 | |
| neutralize | |||
| comment |