wide
| name | Au | Au | unit |
| sample shape | film | film | |
| orbit | wide | wide | |
| source | Ga Ka | Al Ka | |
| source energy | 9251.74 | 1486 | eV |
| pass energy | 500 | 200 | |
| start energy (kinetic) | 5551.74 | 300 | eV |
| end energy (kinetic) | 9251.74 | 1491 | eV |
| start energy (binding) | 0 | -5 | eV |
| end energy (binding) | 3700 | 1186 | eV |
| energy step | 1 | 1 | eV |
| dwell / point | 0.3 | 0.3 | sec |
| number of sweep | 1 | 1 | sweep |
| mode | Swept | Swept | |
| total measurement time | 18.725 | 6.05 | min |
| entrance slit | 0.5 | 0.5 | mm |
| lens mode | Transmission | Transmission | |
| data points | 3701 | 1192 | |
| take off angle | 88 | 88 | |
| neutralize | |||
| comment |