Au 3d
| name | Au | unit |
| sample shape | film | |
| orbit | Au 3d | |
| source | Ga Ka | |
| source energy | 9251.74 | eV |
| pass energy | 200 | |
| start energy (kinetic) | 6921.74 | eV |
| end energy (kinetic) | 7071.74 | eV |
| start energy (binding) | 2180 | eV |
| end energy (binding) | 2330 | eV |
| energy step | 0.2 | eV |
| dwell / point | 0.2 | sec |
| number of sweep | 10 | sweep |
| mode | Swept | |
| total measurement time | 27.9667 | min |
| entrance slit | 0.5 | mm |
| lens mode | Transmission | |
| data points | 751 | |
| take off angle | 88 | |
| neutralize | ||
| comment |